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A G R E AT E R M E A S U R E O F C O N F I D E N C E Imeasure circle represents the built-in amme-
ter, and it, too, can control the source block.
The voltage and current output go be-
tween the Force terminal and the Common
terminal. By Kirchoff's loop rule, all current
flowing out of the Force terminal must flow
into the Common terminal. The return path
is normally direct, although in some cases
another SMU can act as the return path.
Note the Sense and Sense Lo terminals.
These special high-impedance terminals
are used to more accurately sense voltage at
Tips, Tricks,
the DUT (device under test), and no current
flows in them. They are used only where ex-
treme accuracy is needed, or in some special
and Traps for
applications.
Interpreting published
Advanced SMU specifications
It's important to understand both the
DC Measurements
source and measure specifications, because
they have a large impact on many measure-
ments. Table 1 gives partial specifications
for the Keithley model 4210-SMU found in
Lee Stauffer, Keithley Instruments, Inc. the 4200-SCS Semiconductor Characteriza-
tion System. Most of the examples in this
article are affected by one or more of these
In most applications, an SMU (source- The Vmeasure circle represents the built-in specifications.
measure unit or SourceMeter