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Number 3180
Application Note Performing van der Pauw Sheet
Series Resistance Measurements Using the
Keithley S530 Parametric Tester
Accurate low voltage measurements are essential to many compared to the area of the structure), be homogenous in
semiconductor tests. Often, test structures such as contact chains, composition, and be symmetrical. More importantly, the contacts
vias, and metal structures have resistances on the order of tens must be on the perimeter of the structure and be much smaller
to hundreds of milliohms. Measuring such small resistances than the area of the structure.
accurately usually requires forcing current and measuring Figure 2 shows one of the most widely used forms of a van
voltage because most source-measurement instruments have der Pauw resistivity structure: the Greek cross. The Greek cross
limited low-voltage source accuracy. However, even when current structure yields accurate resistivity data and is easy to design
is forced through these structures, the resulting voltages are and lay out.
small, necessitating the use of an accurate voltage measuring
instrument, such as a digital multimeter (DMM) with at least 6