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Agilent PNA-L Network Analyzers Application Note On-Wafer SOLT Calibration Using 4-port PNA-L Network Analyzers (N5230A Options x4x) Introduction This application note is intended for on-wafer applications using the 4-port, PNA-L network analyzers with two dual probes to achieve full 4-port on-wafer calibrations manually. 4-port PNA-L network analyzers are available in 13.5 or 20 GHz models. PNA-L firmware revision must be 6.03 or higher. This documentation provides step-by-step instructions needed to set up a calibration kit before a 4-port SOLT (Short-Open-Load-Thru) calibration can be performed. The steps outlined here can be applied toward nearly any kind of non-coaxial application, of which on-wafer is one. Equipment used:

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