Keithley 4200 CV ApplicationsGuide free download

File name 4200 CV ApplicationsGuide.pdf

www.keithley.com appl icat i ons gui de C-V Testing for Components and Semiconductor Devices a g r e a t e r m e a s u r e o f c o n f i d e n c e C-V Testing for Components and Semiconductor Devices Capacitance-Voltage (C-V) testing is widely used to determine a variety of semiconductor parameters, such as doping concentration and profiles, carrier lifetime, oxide thickness, interface trap density, and more. This C-V testing applications e-guide features a concentration of application notes on C-V testing methods and techniques using Keithley's Model 4200-SCS Parameter Analyzer. The Model 4200-SCS provides three C-V methods: Multi-frequency C-V (1kHz - 10MHz,), Very Low Frequency C-V (10mHz - 10Hz,) and Quasi-static C-V measurements. Contents CV Characterization of MOS Capacitors Using the Model 4200SCS Parameter Analyzer . . . . . . . . . 3 Performing Very Low Frequency Capacitance Voltage Measurements on High Impedance Devices Using the Model 4200SCS Parameter Analyzer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13 Using the Ramp Rate Method for Making Quasistatic CV Measurements with the Model 4200SCS Parameter Analyzer . . . . . . . . . . . . . . . . . 23 Using the Model 4200CVUPWR CV Power Package to Make High Voltage and High Current CV Measurements with the Model 4200SCS Parameter Analyzer . . . . . . . . . . . . . . . . . . . . . . . . . . 27 Measuring Inductance Using the 4200CVU CapacitanceVoltage Unit . . . . . . . . . . . . . . . . . . . . . . 35 Electrical Characterization of Photovoltaic Materials and Solar Cells with the Model 4200 SCS Parameter Analyzer . . . . . . . . . . . . . . . . . . . . . . . 37 Making Proper Electrical Connections to Ensure Semiconductor Device Measurement Integrity . . . . 53 www.keithley.com 1 www.keithley.com C-V Characterization of MOS Capacitors Using the Model 4200-SCS Parameter Analyzer Introduction C Q V Maintaining the qu