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ON-WAFER MEASUREMENTS WITH THE HP 8510 NETWORK ANALYZER AND CASCADE MICROTECH WAFER PROBES Eric Strid President and C.E.O. Cascade Microtech, Inc. P.O. Box 2015 Beaverton, Oregon 97075 RF & Microwave Measurement Symposium and Exhibition Flin- HEWLETT ~~ PACKARD www.HPARCHIVE.com Hewlett-Packard is pleased to have the opportunity to present this paper, written by Eric Strid of Cascade Microtech, Inc., at the RF & Microwave Measurement Symposium and Exhibition. Abstract: This paper presents a system, consisting of the HP 8510 network analyzer and Cascade Microtech wafer probes, that is used to make RF measurements of microwave devices and IC's (MMIC's) directly on-wafer. The configuration of the system and the characteristics of the wafer probes are described. Techniques for making the best possible on-wafer measurements will also be addressed, and a range of on-wafer measurement applications will be examined. Biography Eric Strid received his BSEE degree at MIT in 1974 and MSEE degree from UC Berkeley in 1975. He first worked on microwave MIC's at Farinon Transmission Systems, San Carlos, CA. In 1979, he joined the gallium arsenide research group at Tektronix, which has recently evolved into TriQuint Semiconductor. In 1983, he co-founded Cascade Microtech, Inc., where he is now President and CEO. Eric has published various papers on power GaAs FET's, noise figure measurements, analog and digital GaAs IC's, and high-frequency wafer probing. www.HPARCHIVE.com In this talk, we'll be covering the basics and some details of how to use the Cascade Microtech Wafer Probe System with HP 8510 Vector Network Analyzer. ON-WAFER MEASUREMENTS WITH THE HP 8510 NETWORK ANALYZER AND CASCADE MICROTECH WAFER PROBES 5315 We'll start with an introduction of the problem of wafer probing at very high frequencies and a discussion of the requirements of a probe for microwave frequencies. Then we'll talk about the mechanical and electrical aspects of the OUTLINE