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Keysight Technologies
Electromagnetic Simulations at the
Nanoscale: EMPro Modeling and Comparison
to SMM Experiments
Application Note
Introduction
n this application note, we describe electromagnetic (EM) simulations using Keysight
Technologies' EMPro software1 to support the interpretation of scanning microwave
microscope (SMM) experiments. The SMM is a new scanning probe microscope that
combines the electromagnetic measurement capabilities of a microwave Performance
Network Analyzer (PNA) with the nanometer-resolution and Angstrom-scale positioning
capabilities of an atomic force microscope (AFM).
Scanning microwave microscopy is a technique for measuring reflection scattering
parameters and corresponding electric properties of materials at the nanoscale in the
frequency range of 1