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Agilent
PNA-L Network Analyzers
Application Note
On-Wafer SOLT Calibration Using
4-port PNA-L Network Analyzers
(N5230A Options x4x)
Introduction This application note is intended for on-wafer applications using the 4-port, PNA-L
network analyzers with two dual probes to achieve full 4-port on-wafer calibrations
manually. 4-port PNA-L network analyzers are available in 13.5 or 20 GHz models.
PNA-L firmware revision must be 6.03 or higher.
This documentation provides step-by-step instructions needed to set up a calibration
kit before a 4-port SOLT (Short-Open-Load-Thru) calibration can be performed. The steps
outlined here can be applied toward nearly any kind of non-coaxial application, of which
on-wafer is one.
Equipment used: