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Number 2615

Application Note Measuring the Resistivity and Determining the
Series Conductivity Type of Semiconductor Materials
Using a Four-Point Collinear Probe and the
Model 6221 DC and AC Current Source
Introduction The two outer probes source current, while the two inner
probes sense the resulting voltage drop across the sample. The
Resistivity and conductivity type are fundamental properties volume resistivity is calculated with this equation:
of semiconductors and are critical parameters in both materi-
V
als research and wafer fabrication. A semiconductor's resistivity = ____