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www.keithley.com S680
S680
The Next Generation of Parametric Test Performance
A G R E A T E R M E A S U R E O F C O N F I D E N C E
Parallel test and adaptive testing
Minimize your test times
Lights-out 40GHz production RF testing
RF measurements as easy as DC
Modular per-pin electronics
Extendable platform
Sub-femtoamp noise
See more, faster
Flexible SECS/GEM automation
Integrates into your test floor operations
The S680's flexible architecture ensures that, no
matter what tomorrow's devices look like or how
they perform, you'll be able to upgrade or reconfigure
your tester cost-effectively to handle them.
Taking on your next generation of test challenges
Keithley can build an S680 tester optimized for your emerging We back up the S680 with a full staff of parametric test experts,
parametric test requirements, including: who not only understand the physics of new materials and
devices, but lead the industry in their knowledge of electrical
n Advancedtransistorgatedielectrics. test instrumentation and test setup. They'll work closely with
n RFs-parametermeasurementsatupto40GHz you to develop new measurement capabilities as new test
forhighperformanceprocesses. needs emerge, so you can meet your process development and
process ramp goals.
n Copper/lowkmaterialssystems.
Minimize your long-term cost of test by
n Embeddedmemories,suchasferroelectric
maximizing your capital equipment reuse
andmagnetic-baseddevices.
At Keithley, we're passionate about protecting your investment
n Measurementsonadvancedsubstrates in our products. The S680's robust, modular design supports
likeSOIandSiGe. highly cost-effective field upgrades. That means it will go
n Femtoamp-levelDCmeasurementsfor on meeting your emerging measurement needs for many
lowleakagemobiledevices. years to come. For example, the per-pin electronics in the
S680's testhead that let you to make lab-grade DC and AC
n Adaptiveandparalleltestingforimproved measurements on all 64 pins of a production tester today will
throughputandreducedcostoftest. also support your on-wafer RF measurements to 40GHz on
dedicated pins.
The S600 Series parametric test platform on which the S680
is based is flexible and extendable, providing industry leading Control 300mm wafer processes in
measurement capabilities for today, as well as for future 200mm test times
technology generations. This flexible architecture ensures S600 Series innovations like smart Source-Measure Units
that, no matter what tomorrow's devices look like or how they (SMUs) and the SimulTest parallel test software option (patent
perform, you'll be able to upgrade or reconfigure your tester pending) help you maximize test throughput by measuring up
cost-effectively to handle them. In fact, our design team is to nine devices simultaneously in a single probe touchdown.
already at work on solving the parametric test challenges you'll A new Force-Measure Interlock (FMI) firmware/software
face with the next two generations of devices. solution minimizes crosstalk and noise, reducing measurement
variability when testing devices in parallel. The AdapTest
Software Option allows changing test plans automatically in real
time, based on site-level results. This adaptive testing approach
can increase your test cell throughput by intelligently reducing
the amount of data collected on good wafers or by automating
first-level process diagnostics when unexpected results
are obtained.
Superior measurement capability--today and tomorrow
S600 Series parametric testers have always combined high The S680 also includes a wide range of instrumentation options
throughput with superior measurement integrity and broad for non-DC measurements:
testing flexibility. That's why they fit so well into a wide range