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S530
Semiconductor Parametric Test Systems
Cost-effective, high throughput solutions
n Low acquisition cost; low cost
of ownership
n Round-the-clock productivity
n Readily adaptable to new devices
and test requirements
n Fast, flexible, interactive test
plan development
n Wide range of configuration and
measurement options
a g r e a t e r m e a s u r e o f c o n f i d e n c e
S530 systems combine the speed and
low acquisition cost your test floor demands today. . . . . . with the low cost of ownership, flexibility,
and adaptability you'll need tomorrow.
SMU SMU SMU SMU
A B A B
Processor
Traditional "big iron" parametric testers are fine for ultra-high-volume (Master) Processor
fabs that only test a limited number of processes and products using
Processor
System TSP Bus To
lower voltages and currents. But for a growing number of fabs, they're Controller
Switch
Probe Card
Matrix
simply too expensive and too inefficient, and do not provide the Adapter
higher voltages needed for a wide range of power devices. Today's
Processor Processor
high mix, lower volume fab environments demand flexible systems
designed to switch quickly from testing one product or technology to SMU SMU SMU SMU
A B A B
another. Keithley's S530 Parametric Test Systems embody the
knowledge and expertise we've acquired over the last four decades in
cost-effective, high throughput semiconductor testing.
Engineered for production parametric test
S530 Performance Envelope
S530 Performance Envelope
1E+0 Keithley's production-qualified source measure unit (SMU)
instruments speed and simplify DC I-V testing, ensure high accuracy
and repeatability, and extend hardware life. Measurement commands
1E