Agilent Rapid Mechanical Properties of Multi-layer Film Stacks - Application Note 5991-4077EN c20140318 [8] free download

File name Rapid Mechanical Properties of Multi-layer Film Stacks - Application Note 5991-4077EN c20140318 [8].

Rapid Mechanical Properties of Multi-layer Film Stacks Application Note Jennifer Hay, Agilent Technologies Abstract Agilent's most recent leap in technology, In this work, we measure the mechanical Express Test, improves our ability to properties of 50nm films with remarkable characterize thin films by dramatically precision and accuracy. The precision increasing the number of independent is due to Express Test, which performs measurements which can be made in a indentations at a rate of one per second, given time period. Why is it important to thereby allowing many indentations to make more measurements on thin films? be included in the final determination It is important, because nanoindentation of modulus and hardness. The accuracy measurements of Young's modulus and is due, in part, to an analytic model hardness tend to grow more scattered which yields the substrate-independent as the indentation depth decreases, moduli of thin films. In order to apply the primarily due to surface roughness, thin-film model to a stack of multiple but more scatter can be overcome with films, the film modulus of each new more measurements. Express Test layer is determined and then used as is Agilent's proprietary technology the "substrate" modulus for the next for rapid indentation. Express Test layer. This process could be repeated performs indentations in less than five ad infinitum. The thin-film model reveals seconds, thus dramatically increasing a large difference in Young's modulus the number of statistically independent between two 50nm films. measurements which can be made in a given time period. Introduction For all its advantages, Express Test is The primary motivation behind nanoindentation at its simplest. The nanoindentation has always been the indenter approaches the test surface desire to measure the mechanical until contact is detected, loads to properties of small volumes of material, achieve the target force or displacement, especially in the form of thin films. In withdraws the indenter from the the present application, we see how two sample, and then moves the sample into recent developments in nanoindentation position for the next indentation. The work together to allow the quantitative contact stiffness is calculated using characterization of films as thin as 50nm. the upper 50% of the unloading curve (i.e. forces which are greater than 50% of the peak force, and corresponding properties of the supporting substrate. Experimental Method displacements, acquired during However, Agilent's proprietary thin-