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File name HP 10770A OPS.pdf 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description Description NOTE In this subchapter refers to either or both of the Agilent 10737L and Agilent 10737R interferometers. The Agilent 10737L/R Compact Three-Axis interferometers (see figures 7O-1 through 7O-3) allow up to three measurements (displacement, pitch, and yaw) to be made on a single axis. The Agilent 10737L and Agilent 10737R interferometers are identical except that the "L" bends the measurement beams to the left and the "R" bends the beams to the right, as viewed from the incoming beam (see figures 7O-2 and 7O-3). These interferometers are designed to use a 3 mm diameter laser beam, available from an Agilent 5517C-003 Laser Head. The measurement beam parallelism inherent in the design of the Agilent 10737L/R interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy for pitch and yaw measurements. These interferometers are designed for direct attachment of Agilent 10780F-037 Remote Receiver's fiber-optic sensor head (one per axis). The Agilent 10780F-037 receiver is the same as the standard receiver, except it does not include the lens assembly that attaches to some Agilent interferometers; in this case, the required lens assembly is part of the Agilent 10737L/R interferometer. This simplifies user assembly, since no optical alignment of the receiver is required. The fiber-optic cables from the receivers attach directly to the axis output apertures on the input face of the interferometer. See figures 7O-2 and 7O-3. The Agilent 10737L/R interferometers are based on the Agilent 10706B High-Stability Plane Mirror Interferometer's design. Figure 7O-1 shows two views of an Agilent 10737L interferometer. In addition to the Agilent 10706B components, the interferometer includes the following assemblies: |
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